美国ENTEGRIS英特格，滤芯PN2H010E1
美国ENTEGRIS英特格，滤芯PN2H010E1
美国ENTEGRIS英特格，滤芯PN2H010E1
美国ENTEGRIS英特格，滤芯PN2H010E1
ProcessGard
NP Filter
SLIDE DETAILS.
Point-of-tool filter with superior contaminant retention capabilities and good flow-rate-performance in post-CMP rinse processes for all technology nodes.
Product Specifications
Materials: Membrane: Polypropylene (all 0.5 µm and 1.0 µm filters have some glass fibers included)
Supports: Polypropylene supports, cage, core, and sleeves and end caps
O-rings: Ethylene propylene (EP) o-ring or gasket standard; Viton fluoroelastomer, and fluoropolymer encapsulated Viton fluoroelastomer o-ring (TEV)
Connections: Code 0 (2-222), or Code F (flat gasket)
Maximum operating conditions: Maximum differential pressure: 0.483 MPa (4.83 bar, 70 PSID) at 25°C Maximum operating temperature: 80°C
