美国ENTEGRIS英特格，过滤器，Entegris Ar POU GPUS2500FHX08R00CA
美国ENTEGRIS英特格，过滤器，Entegris Ar POU GPUS2500FHX08R00CA
美国ENTEGRIS英特格，过滤器，Entegris Ar POU GPUS2500FHX08R00CA
美国ENTEGRIS英特格，过滤器，Entegris Ar POU GPUS2500FHX08R00CA
美国英特格Entegris纯化器，GPUS2500FIX08R00CA
Entegris、Mykrolis、Millipore纯化器，GPUS2500FIX04R00CA
GateKeeper
GPU Gas Purifiers
GateKeeper GPU series of purifiers were designed to improve process gas consistency, lifetime and outlet purity.
Purity to ppt levels
Wide range of gas compatibility, including corrosive gases such as Cl2, HBr, HCl, CF4, SO2, SF6
Low pressure drop across the purifier
CE certified to the pressure equipment directive PED and manufactured in an ISO 9001-2000 facility
Regenerable – eliminates disposal issues and costs
Long lifetime – improved cost of ownership
Use ambient temperature purification
APPLICATIONS
GateKeeper GPU Gas Purifiers Applications
Bulk gas delivery
Photolithography
Epitaxy
Dry etch
Wafer growing
Deposition
REFERENCE MATERIALS
MICROCONTAMINATION CONTROL
GateKeeper
GPU
TX Media Gas Purifiers
Superior purity control
Entegris’ GateKeeper GPU gas purifiers were designed
to improve purity consistency, lifetime, and final purity in
microelectronics applications where high-purity gas is critical.
Leveraging our expertise in material science, we have developed
a new generation of TX gas purification products that deliver
unsurpassed value and performance.
APPLICATIONS
—
• Semiconductor
• Data storage
• Flat panel display
• LED
• Solar
FEATURES & BENEFITS
—
Process control and protection Purity control below part-per-billion (ppb) levels
Low pressure drop through the purifier
CE certified to the Pressure Equipment Directive (PED)
Manufactured in an ISO 9001:2015 facility
Cost effective Regenerable – eliminates disposal issues and costs
Long lifetime — improves cost of ownership
Safe and simple to use Uses ambient temperature purification — no heat or power
required to operate
Insensitive to orientation (horizontal / vertical)
微观控制
看门人
GPU
TX媒体气体净化器
高纯度控制
设计了integris的GateKeeper GPU气体净化器
提高纯度的一致性，使用寿命和最终纯度
高纯度气体至关重要的微电子应用。
利用我们在材料科学方面的专业知识，我们开发了
提供新一代TX气体净化产品
无与伦比的价值和性能。
应用程序
- - - - - -
•半导体
•数据存储
•平板显示
•领导
•太阳能
特点和优点
- - - - - -
工艺控制和保护纯度控制在十亿分之一(ppb)以下
低压降通过净化器
CE压力设备指令(PED)认证
在ISO 9001:2015工厂生产
具有成本效益的可再生-消除处理问题和成本
长寿命-提高拥有成本
使用环境温度净化-无需加热或电源
需要操作
对方向不敏感(水平/垂直)