美国Entegris英特格,气动阀，DS12-2C-16F-3
美国Entegris英特格,气动阀，DS12-2C-16F-3
美国Entegris英特格,气动阀，DS12-2C-16F-3
Integra
Pneumatic Valves, 3/4" Orifice, 2-way, Normally Closed
A reliable and cost-effective solution for CMP slurry and high-purity chemical distribution systems. An innovative diaphragm design maximizes stroke, enabling a very high flow rate with a small footprint.
Unique internal radius enables a fully swept, increased flow path, decreased pressure drop and reduced shear
All wetted parts are PFA and PTFE, external parts are PVDF, providing higher chemical resistance and reliability
No external metal parts and no metals in secondary containment chamber means lower contamination potential in the event of a media leak or exposure to harsh external environments
External, nonwetted components are available in ECTFE material for higher chemical resistance to oxygenated solvents and bases
A variety of connections including PrimeLock, PrimeLock “SpaceSaver”, Flaretek, Flaretek “SpaceSaver”, PureBond and Super 300 Type Pillar fitting
Stand alone mounting base enables valve installation and removal without tools
Notes:
Not all configurations are permitted. Contact Entegris if multiple special order features are required.
Pillar nuts, inserts and gauge rings included as standard.
APPLICATIONS
Integra Pneumatic Valves, 3/4" Orifice, 2-way, Normally Closed Applications
CMP slurry, ultrapure water and high-purity, corrosive chemical handling
High flow chemical distribution applications
Chemical line sizes in 3/4" to 1"
Port Connection Flow Factor CV Flow Factor KV A B C D
3/4" Flaretek1 6.7 95.7 5.27" (133.9 mm) 0.80" (20.3 mm) 3.87" (98.3 mm) 4.17" (105.9 mm)
3/4" Super 300 Type Pillar fitting 6.7 95.7 5.25" (133.4 mm) 0.80" (20.3 mm) 3.87" (98.3 mm) 4.17" (105.9 mm)
3/4" PrimeLock 6.7 95.7 5.92" (150.4 mm) 0.96" (24.4 mm) 4.23" (107.4 mm) 4.53" (115.1 mm)
3/4" PureBond 8.2 117.1 6.59" (167.4 mm) 0.80" (20.3 mm) 3.87" (98.3 mm) 4.17" (105.9 mm)
1" Flaretek1 9.8 140.0 5.74" (145.8 mm) 0.96" (24.4 mm) 4.23" (107.4 mm) 4.53" (115.1 mm)
1" Super 300 Type Pillar fitting 9.8 140.0 5.75" (146.1 mm) 1.04" (26.4 mm) 4.31" (109.5 mm) 4.61" (117.1 mm)
1" PrimeLock 9.8 140.0 6.26" (159.0 mm) 1.12" (28.4 mm) 4.39" (111.5 mm) 4.69" (119.2 mm)
1" PureBond 10.9 155.7 6.59" (167.4 mm) 0.96" (24.4 mm) 4.23" (107.4 mm) 4.53" (115.1 mm)
1(PVDF), -3 (PFA), -6 (CPFA) or -II (PFA FlareLock® II) nuts
Sensing Option Dimensional Information (shown in the 3rd drawing above)
A Remote Position Indication option is available to monitor valve open and closed positions electronically.
Note: To enable the remote position indication option you must special order the Omron® sensor (-OM) on the valve. In addition, order Omron position sensor indicator (EE-SX770R or EE-SX770A), which are sold separately.
