Honeywell Analytics霍尼韦尔，MMS-D2，MMS-S2，MMS-Z2
Honeywell Analytics霍尼韦尔，MMS-D2，MMS-S2，MMS-Z2
Honeywell Analytics霍尼韦尔，MMS-D2，MMS-S2，MMS-Z2
SMART SENSORS
Gas Name Chemical Formula Range Sensor Part Number
Hydrogen Chloride HCl 0 - 8 ppm MMS-E2
Boron Trichloride BCl3 0 - 8 ppm MMS-E2
Dichlorosilane SiH2Cl2 0 - 8 ppm MMS-E2
Hydrogen Bromide HBr 0 - 8 ppm MMS-E2
Silane SiH4 0 - 20 ppm MMS-X2
Disilane Si2H6 0 - 20 ppm MMS-X2
Hydrogen H2 0 - 1000 ppm MMS-G2
Chlorine Cl2 0 - 2 ppm MMS-L2
Ammonia NH3 0 - 100 ppm MMS-A2
Carbon Monoxide CO 0 - 100 ppm MMS-C2
Phosphine PH3 0 - 1200 ppb MMS-R2
Ozone O3 0 - 0.4 ppm MMS-U2
Oxygen O2 0 - 25% v
MMS-D2
Sulfur Dioxide SO2 0 - 8 ppm MMS-S2
Hydrogen Fluoride HF 0 - 12 ppm MMS-Z2
Boron Trifluoride BF3 0 - 8 ppm MMS-Z2
Tungsten Hexafluoride WF6 0 - 12 ppm MMS-Z2