美国ENTEGRIS英特格过滤器，SVTV02TQ1PW滤芯，Savana® AT Filter
美国ENTEGRIS英特格过滤器，SVTV02TQ1PW滤芯，Savana® AT Filter
美国ENTEGRIS英特格过滤器，SVTV02TQ1PW滤芯，Savana® AT Filter
Cost effective filtration for non-outgassing chemistries and solvents at moderate temperatures in applications where metal control is not critical.
APPLICATIONS
Savana
AT Filter Applications
Aggressive acid and base, point-of-tool filtration
Bulk chemical delivery and wet etch and clean semiconductor applications
Purification life sciences applications
Bulk chemical flat panel display applications
Substrate - Ni-P plating and magnetic head - wet etch and clean data storage applications
LED applications
Product Specifications
Materials: Membrane PTFE
Support PFA
O-ring Encapsulated FKM (E-FKM)
Retention rating: 0.05, 0.1, 0.2, 0.5, 1, 5, 10 µm
Shelf life (prewet option): 1 year
Membrane area: 4" 0.23 m2 (2.48 ft2)
10" 0.8 m2 (8.61 ft2)
20" 1.6 m2 (17.22 ft2)
30" 2.4 m2 (25.83 ft2)
Maximum operating conditions: Maximum forward differential pressure 0.51 MPa (5.1 bar, 74 psi) @ 25°C (77°F)
Maximum reverse differential pressure 0.35 MPa (3.5 bar, 50 psi) @ 25°C (77°F)
Maximum operating temperature 120°C (248°F) at the above conditions
Notes:
Prewet filters are enclosed in bag filled with DI water and 1% H202. Drain and flush with 20 liters of DI water (per 10”) after installing filter.
Savana AT can be sterilized by autoclaving up to 50 cycles at 125°C or sterilized by steam-in-place up to 50 cycles at 135°C for 30 minutes at less than 0.3 bar differential pressure.
PART NUMBERS
Savana AT Filter Part Numbers
PART NUMBER CHEMLOCK KEY PREWET LENGTH RETENTION RATING
SVTA01TQ1 No No 10" 1 µm
SVTA01TQ1K Yes No 10" 1 µm
SVTA01TQ1KPW Yes Yes 10" 1 µm
SVTA02TQ1 No No 20" 1 µm
SVTA02TQ1K Yes No 20" 1 µm
SVTA02TQ1KPW Yes Yes 20" 1 µm
SVTA02TQ1PW No Yes 20" 1 µm
SVTA03TQ1 No No 30" 1 µm
SVTA0MTQ1 No No 4" 1 µm
SVTA0MTQ1PW No Yes 10" 1 µm
SVTB01TQ1 No No 10" 5.0 µm
SVTB01TQ1K Yes No 10" 5.0 µm
SVTB01TQ1KPW Yes Yes 10" 5.0 µm
SVTB01TQ1PW No Yes 10" 5.0 µm
SVTB02TQ1 No No 20" 5.0 µm
SVTB03TQ1 No No 30" 5.0 µm
SVTB0MTQ1 No No 4" 5.0 µm
SVTC01TQ1 No No 10" 10 µm
SVTC01TQ1K Yes No 10" 10 µm
SVTC01TQ1KPW Yes Yes 10" 10 µm
SVTC01TQ1PW No Yes 10" 10 µm
SVTC02TQ1 No No 20" 10 µm
SVTC03TQ1 No No 30" 10 µm
SVTC0MTQ1 No No 4" 10 µm
SVTC0MTQ1PW No Yes 4" 10 µm
SVTG01TB1PW No Yes 10" 0.2 µm
SVTG01TQ1 No No 10" 0.2 µm
SVTG01TQ1K Yes No 10" 0.2 µm
SVTG01TQ1KPW Yes Yes 10" 0.2 µm
SVTG01TQ1PW No Yes 10" 0.2 µm
SVTG02TQ1 No No 20" 0.2 µm
SVTG02TQ1K Yes No 20" 0.2 µm
SVTG02TQ1KPW Yes Yes 20" 0.2 µm
SVTG02TQ1PW No Yes 20" 0.2 µm
SVTG03TQ1 No No 30" 0.2 µm
SVTG03TQ1PW No Yes 30" 0.2 µm
SVTG0MTQ1 No No 4" 0.2 µm
SVTG0MTQ1PW No Yes 4" 0.2 µm
SVTG73T01 No No 30" 0.2 µm
SVTH01TQ1K Yes No 10" 0.5 µm
SVTH01TQ1KPW Yes Yes 10" 0.5 µm
SVTH01TQ1PW No Yes 10" 0.5 µm
SVTH02TQ1K Yes No 20" 0.5 µm
SVTH02TQ1KPW Yes Yes 20" 0.5 µm
SVTH02TQ1PW No Yes 20" 0.5 µm
SVTH0MTQ1 No No 4" 0.5 µm
SVTH0MTQ1PW No Yes 4" 0.5 µm
SVTV01TQ1 No No 10" 0.1 µm
SVTV01TQ1K Yes No 10" 0.1 µm
SVTV01TQ1KPW Yes Yes 10" 0.1 µm
SVTV01TQ1PW No Yes 10" 0.1 µm
SVTV02TQ1 No No 20" 0.1 µm
SVTV02TQ1K Yes No 20" 0.1 µm
SVTV02TQ1KPW Yes Yes 20" 0.1 µm
SVTV02TQ1PW No Yes 20" 0.1 µm
SVTV03TQ1 No No 30" 0.1 µm
SVTV03TQ1PW No Yes 30" 0.1 µm
SVTV0MTQ1 No No 4" 0.1 µm
SVTV0MTQ1PW No Yes 4" 0.1 µm
SVTY01TQ1 No No 10" 30 nm
SVTY01TQ1K Yes No 10" 30 nm
SVTY02TQ1 No No 20" 30 nm
SVTZ01TQ1 No No 10" 0.05 µm
SVTZ01TQ1K Yes No 10" 0.05 µm
SVTZ01TQ1KPW Yes Yes 10" 0.05 µm
SVTZ01TQ1PW No Yes 10" 0.05 µm
SVTZ02TQ1 No No 20" 0.05 µm
SVTZ02TQ1K Yes No 20" 0.05 µm
SVTZ02TQ1KPW Yes Yes 20" 0.05 µm
SVTZ02TQ1PW No Yes 20" 0.05 µm
SVTZ03TQ1 No No 30" 0.05 µm
SVTZ03TQ1PW No Yes 30" 0.05 µm
SVTZ0MTQ1 No No 4" 0.05 µm
SVTZ0MTQ1PW No Yes 4" 0.05 µm