美国ENTEGRIS应特格过滤器GSCFM1E00KT，Guardian™ PS Filter，MRO现货20个
美国ENTEGRIS应特格过滤器GSCFM1E00KT，Guardian™ PS Filter，MRO现货20个
美国ENTEGRIS应特格过滤器GSCFM1E00KT，Guardian™ PS Filter，MRO现货20个
Guardian
PS Filter
SLIDE DETAILS.
Download Image
Provides advanced filtration for low temperature, critical, dilute, aqueous and low-high pH cleaning applications at sub-2x nm technology nodes.
Available with 1 nm or 5 nm retention rating, which improves single-pass retention efficiency, reduces on-wafer defects, and enables higher yield
An asymmetric membrane ensures tighter particle retention while maintaining high flow rates
Ultraclean (UC) filtration technology enables less contamination and faster system flush up while extending tool uptime and increasing device yield
APPLICATIONS
Guardian PS Filter Applications
Guardian PS UC liquid filters are ideal in point-of-tool applications involving:
Dilute acid process chemicals such as BOE and DHF
Dilute base process chemicals such as NH4OH and TMAH
DI water
Low-temperature processes (<70°C)
Product Specifications
Materials Membrane Nondewetting polysulfone (PS)
Supports, sleeve, core, end caps High-density polyethylene (HDPE)
Code 0 double 2-222 O-rings Encapsulated fluoropolymer (E-FKM) or Kalrez 6375
Chem-Line II disposable outer shell Polypropylene (PP) and PFA
Chem-Line I disposable outer shell PFA
Retention rating 1 nm, 5 nm
Membrane surface area 10” 1 nm: 1.7 m2 (18.30 ft2)
20" 1 nm: 3.4 m2 (36.60 ft2) 10" 5 nm: 1.6 m2 (17.22 ft2)
20" 5 nm: 3.2 m2 (34.44 ft2)
Maximum operating conditions Maximum forward differential pressure:
0.34 MPa (3.4 bar; 50 psid) @ 25°C (77°F)
Maximum reverse pressure:
0.21 MPa (2.1 bar; 30 psi) @ 25°C (77°F)
Maximum operating pressure:
0.58 MPa (5.8 bar; 84 psi) @ 25°C (77°F)
Maximum operating temperature:
70°C (158°F) @ 23 psi
Note: Filters are prewet – enclosed in a bag filled with DI water and 0.9% H2O2.
PART NUMBERS
Guardian PS Filter Part Numbers
PART NUMBER RETENTION RATING LENGTH CONFIGURATION SHELL TYPE CONNECTION CHEMLOCK KEY O-RING
GS2EM1FM01FT 1 nm 10" In-line PP 3/4" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GS2EM1FM31FT 1 nm 10" In-line PP 3/8" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GS2FM1EM01FT 5 nm 10" In-line PP 3/4" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GS2FM1EM21FT 5 nm 10" In-line PP 1/2" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GS2FM1EM31FT 5 nm 10" In-line PP 3/8" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GS2FM1EM41FT 5 nm 10" In-line PP 1" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GSCEM1F000T 1 nm 10" In-line N/A Code 0 No E-FKM
GSCEM1F00KT 1 nm 10" In-line N/A Code 0 Yes E-FKM
GSCEM1F0RKT 1 nm 10" In-line N/A Code 0 Yes Kalrez 6375
GSCEM2F00KT 1 nm 20" In-line N/A Code 0 Yes E-FKM
GSCEM2F0RKT 1 nm 20" In-line N/A Code 0 Yes Kalrez 6375
GSCFM1E000T 5 nm 10" In-line N/A Code 0 No E-FKM
GSCFM1E00KT 5 nm 10" In-line N/A Code 0 Yes E-FKM
GSCFM1E0RKT 5 nm 10" In-line N/A Code 0 Yes Kalrez 6375
GSCFM2E00KT 5 nm 20" In-line N/A Code 0 Yes E-FKM
GSCFM2E0RKT 5 nm 20" In-line N/A Code 0 Yes Kalrez 6375
GSDEM1F902ST 1 nm 10" T-line PFA 3/4" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar fitting No N/A
GSDEM1F942ST 1 nm 10" T-line PFA 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar fitting No N/A
GSDEM1FT02HT 1 nm 10" T-line PFA 3/4" inlet/outlet, 1/2" vent/drain, Super Type Pillar Fitting No N/A
GSDFM1E902ST 5 nm 10" T-line PFA 3/4" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar fitting No N/A
GSDFM1E942ST 5 nm 10" T-line PFA 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar fitting No N/A
GSDFM1ET02HT 5 nm 10" T-line PFA 3/4" inlet/outlet, 1/2" vent/drain, Super Type Pillar Fitting No N/A
GSLEM1F102FT 1 nm 10" In-line PFA 3/4" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GSLEM1FM01ST 1 nm 10" In-line PFA 3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar fitting No N/A
GSLFM1E102FT 5 nm 10" In-line PFA 3/4" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GSLFM1EM01ST 5 nm 10" In-line PFA 3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar fitting No N/A
GSLFM1EM41FT 5 nm 10" In-line PFA 1" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GSLFM1EM41ST 5 nm 10" In-line PFA 1" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar fitting No N/A
SV0A010E1
SV0A010T1
SV0A010V1
SV0A01P01
SV0A01PE1
SV0A01PV1
SV0A020E1
SV0A020T1
SV0A020V1
SV0A030T1
SV0A710T1
SV0A710V1
SV0AF10E1
SV0AF10V1
SV0AF20E1
SV0AF20V1
SV0C010E1
SV0C010T1
SV0C010V1
SV0C01P01
SV0C01PE1
SV0C01PV1
SV0C020E1
SV0C020T1
SV0C020V1
SV0C710T1
SV0CF10E1
SV0CF10V1
SV0CF20E1
SV0CF20V1
SV0G010E1
SV0G010T1
SV0G010V1
SV0G01P01
SV0G01PE1
SV0G01PV1
SV0G020E1
SV0G020T1
SV0G020V1
SV0G030E1
SV0G030T1
SV0G030V1
SV0G510T1
SV0G520E1
SV0G530E1
SV0G61P01
SV0G710T1
SV0G710V1
SV0GF10E1
SV0GF10V1
SV0GF20E1
SV0GF20V1
SV0H010E1
SV0H010T1
SV0H010V1
SV0H01P01
SV0H01PE1
SV0H01PV1
SV0H020E1
SV0H020T1
SV0H020V1
SV0H530E1
SV0H61P01
SV0H710V1
SV0HF10E1
SV0HF10V1
SV0HF20E1
SV0HF20V1
SV0S010E1
SV0S010T1
SV0S010V1
SV0S01P01
SV0S01PE1
SV0S01PV1
SV0S020E1
SV0S020T1
SV0S020V1
SV0S030T1
SV0S520E1
SV0S530E1
SV0S61P01
SV0S710T1
SV0S710V1
SV0SF10E1
SV0SF10V1
SV0SF20E1
SV0SF20V1
SV0V010E1
SV0V010T1
SV0V010V1
SV0V01P01
SV0V01PE1
SV0V01PV1
SV0V020E1
SV0V020T1
SV0V020V1
SV0V030E1
SV0V030T1
SV0V030V1
SV0V510E1
SV0V510T1
SV0V520E1
SV0V530E1
SV0V530T1
SV0V530V1
SV0V61P01
SV0V710T1
SV0VF10E1
SV0VF10V1
SV0VF20E1
SV0VF20V1
SVEA005E1
SVEA005T1
SVEA005V1
SVEA010E1
SVEA010T1
SVEA010V1
SVEA01P01
SVEA01PE1
SVEA01PV1
SVEA020E1
SVEA020T1
SVEA020V1
SVEA0S0E1
SVEA0S0T1
SVEA0S0V1
SVEA61PE1
SVEA720T1
SVEA720V1
SVEA730T1
SVEAF10E1
SVEAF10V1
SVEAF20E1
SVEAF20V1
SVEC005E1
SVEC005T1
SVEC005V1
SVEC010E1
SVEC010T1
SVEC010V1
SVEC01P01
SVEC01PE1
SVEC01PV1
SVEC020E1
SVEC020T1
SVEC020V1
SVEC030T1
SVEC510T1
SVEC61P01
SVECF10E1
SVECF10V1
SVECF20E1
SVECF20V1
SVEG005E1
SVEG005T1
SVEG005V1
SVEG010E1
SVEG010T1
SVEG010V1
SVEG01P01
SVEG01PE1
SVEG01PV1
SVEG020E1
SVEG020T1
SVEG020V1
SVEG030E1
SVEG030T1
SVEG030V1
SVEG0S0E1
SVEG0S0V1
SVEG510E1
SVEG510T1
SVEG530E1
SVEG61P01
SVEG61PE1
SVEG705T1
SVEG705V1
SVEG710E1
SVEG710T1
SVEG710V1
SVEG720E1
SVEG720T1
SVEG720V1
SVEG730E1
SVEG730T1
SVEGF10E1
SVEGF10P1
SVEGF10V1
SVEGF20E1
SVEGF20V1
SVEH005E1
SVEH005T1
SVEH005V1
SVEH010E1
SVEH010T1
SVEH010V1
SVEH01P01
SVEH01PE1
SVEH01PV1
SVEH020E1
SVEH020T1
SVEH020V1
SVEH030E1
SVEH030T1
SVEH0S0T1
SVEH61P01
SVEH61PE1
SVEH720E1
SVEH72SE1
SVEHF10E1
SVEHF10V1
SVEHF20E1
SVEHF20V1
SVEHF30E1
SVES005E1
SVES005T1
SVES005V1
SVES010E1
SVES010T1
SVES010V1
SVES01P01
SVES01PE1
SVES01PV1
SVES020E1
SVES020T1
SVES020V1
SVES030T1
SVES520T1
SVES61P01
SVES710T1
SVES720T1
SVES720V1
SVES730T1
SVESF10E1
SVESF10V1
SVESF20E1
SVESF20V1
SVEV005E1
SVEV005T1
SVEV005V1
SVEV010E1
SVEV010T1
SVEV010V1
SVEV01P01
SVEV01PE1
SVEV01PV1
SVEV020E1
SVEV020T1
SVEV020V1
SVEV030E1
SVEV030T1
SVEV030V1
SVEV0S0T1
SVEV520V1
SVEV530T1
SVEV530V1
SVEV730E1
SVEVDL3F1
SVEVDS2C1
SVEVF05E1
SVEVF10E1
SVEVF10V1
SVEVF20E1
SVEVF20V1