ENTEGRIS英特格，Pumpgard™ II Filter过滤器，WDPM0CPSF
ENTEGRIS英特格，Pumpgard™ II Filter过滤器，WDPM0CPSF
ENTEGRIS英特格，Pumpgard™ II Filter过滤器，WDPM0CPSF
Pumpgard
II Filter
SLIDE DETAILS.
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Pre-filtration device that prevents broken wafers from damaging downstream valves, dispense systems, final filters, and other chemical analysis devices.
Fluoropolymer construction provides excellent compatibility with most acids, bases, and nonflammable solvents used in wet stations
Low cost, large pore size design ensures optimum process bath flow with minimum pressure drop, reducing downtime and eliminating risk of damage to expensive pumps
Compact design allows installation into new and existing pumps, ensures low hold-up of process chemicals, which facilitates fast filter changeouts while minimizing downtime and lowering operation costs
APPLICATIONS
Pumpgard II Filter Applications
Semiconductor, flat panel display, data storage
Point-of-tool, wet etch and clean and cleaning processes
Aggressive acids, aggressive bases, solvents, resist strippers
Product Specifications
Materials Filter PFA net
Housing 440 HP PFA
Retention rating 60 μm
Filtration area 23 cm2 (3.5 in2)
Inlet/outlet connections 3/4" tube
3/4" Flaretek fitting
1" Flaretek fitting
Maximum operating conditions Maximum input pressure 0.345 MPa (3.45 bar, 50 psi) at 25°C (77°F)
Maximum forward/reverse differential pressure 0.345 MPa (3.45 bar, 50 psid) at 25°C (77°F)
Maximum operating temperature 3/4”: 180°C (356°F) at 14 psi
1”: 180°C (356°F) at 10 psi
PART NUMBERS
Pumpgard II Filter Part Numbers
PART NUMBER LENGTH CONNECTION
WDPM0CP0F 5" 3/4" Flaretek fitting
WDPM0CP4F 5" 1" Flaretek fitting
WDPM0CPSF 7" 3/4" tube fitting
WDPM0CPST3 7" 3/4" Super 300 type Pillar fitting
WDPM0CPSTP 7" 3/4" Super type Pillar fitting
ENTEGRIS WGFG01DS0 滤芯
ENTEGRIS SVEG01P01
ENTEGRIS SVTG01TQ1
ENTEGRIS SVTG02TQ1
ENTEGRIS WGPM0GGT2 过滤器
ENTEGRIS WGPM0GGT2 过滤器
ENTEGRIS WGPM0GGT4 过滤器
Entegris WG3NS6RR2 过滤器
ENTEGRIS WGFGT1PR1 过滤器
ENTEGRIS WGFGMBRR4 过滤器
ENTEGRIS WGFGT1PR1 过滤器
ENTEGRIS WGFGT1PR1 过滤器
ENTEGRIS WGPMOGGT2 过滤器
ENTEGRIS LGMXFPRR4
ENTEGRIS WGPMOGGT2 过滤器
ENTEGRIS WG3NS2RR4 过滤器
Entegris WG2FT1SS2 过滤器
ENTEGRIS WGPMOGGT2 过滤器
ENTEGRIS WGPM0GGG2 过滤器
ENTEGRIS WGFGT1PR1 过滤器
Entegris WG2FT1RR2 过滤器
entegris CTFG01TPE 滤芯
ENTEGRIS WGPMOGGT4 过滤器
ENTEGRIS WG2F02RR2
ENTEGRIS WG2F02RR2
Entegris WFRGD3 NF-30 3.3 IN LG WG3NS6RR2
ENTEGRIS WG3NS8RR2
ENTEGRIS WGPM0GGG2 过滤器
ENTEGRIS WGPMOGGT2 过滤器
ENTEGRIS WGPMOGGT2
ENTEGRIS WG2F02RR2
ENTEGRIS WG2F02RR4
ENTEGRIS WGMXMPSS3
ENTEGRIS WGMXMPRR4
ENTEGRIS WG3NSMSL2
ENTEGRIS WGFGT1PR1 过滤器
ENTEGRIS WG3NS8RR2 过滤器
ENTEGRIS CBUG0S0S1 过滤器
ENTEGRIS WG3NSMSL2
ENTEGRIS WG3NSMSL2 过滤器
ENTEGRIS WGMXMSRR4 过滤器
ENTEGRIS WGMXMSRR2（无包装）
ENTEGRIS WGMXMSRR2
ENTEGRIS WGMXMSRR2