应特格ENTEGRIS，Guardian™ PS Filter过滤器，GSCFM1E00KT
应特格ENTEGRIS，Guardian™ PS Filter过滤器，GSCFM1E00KT
应特格ENTEGRIS，Guardian™ PS Filter过滤器，GSCFM1E00KT
Guardian
PS Filter
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Provides advanced filtration for low temperature, critical, dilute, aqueous and low-high pH cleaning applications at sub-2x nm technology nodes.
Available with 1 nm or 5 nm retention rating, which improves single-pass retention efficiency, reduces on-wafer defects, and enables higher yield
An asymmetric membrane ensures tighter particle retention while maintaining high flow rates
Ultraclean (UC) filtration technology enables less contamination and faster system flush up while extending tool uptime and increasing device yield
APPLICATIONS
Guardian PS Filter Applications
Guardian PS UC liquid filters are ideal in point-of-tool applications involving:
Dilute acid process chemicals such as BOE and DHF
Dilute base process chemicals such as NH4OH and TMAH
DI water
Low-temperature processes (<70°C)
Product Specifications
Materials Membrane Nondewetting polysulfone (PS)
Supports, sleeve, core, end caps High-density polyethylene (HDPE)
Code 0 double 2-222 O-rings Encapsulated fluoropolymer (E-FKM) or Kalrez 6375
Chem-Line II disposable outer shell Polypropylene (PP) and PFA
Chem-Line I disposable outer shell PFA
Retention rating 1 nm, 5 nm
Membrane surface area 10” 1 nm: 1.7 m2 (18.30 ft2)
20" 1 nm: 3.4 m2 (36.60 ft2) 10" 5 nm: 1.6 m2 (17.22 ft2)
20" 5 nm: 3.2 m2 (34.44 ft2)
Maximum operating conditions Maximum forward differential pressure:
0.34 MPa (3.4 bar; 50 psid) @ 25°C (77°F)
Maximum reverse pressure:
0.21 MPa (2.1 bar; 30 psi) @ 25°C (77°F)
Maximum operating pressure:
0.58 MPa (5.8 bar; 84 psi) @ 25°C (77°F)
Maximum operating temperature:
70°C (158°F) @ 23 psi
Note: Filters are prewet – enclosed in a bag filled with DI water and 0.9% H2O2.
PART NUMBERS
Guardian PS Filter Part Numbers
PART NUMBER RETENTION RATING LENGTH CONFIGURATION SHELL TYPE CONNECTION CHEMLOCK KEY O-RING
GS2EM1FM01FT 1 nm 10" In-line PP 3/4" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GS2EM1FM31FT 1 nm 10" In-line PP 3/8" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GS2FM1EM01FT 5 nm 10" In-line PP 3/4" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GS2FM1EM21FT 5 nm 10" In-line PP 1/2" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GS2FM1EM31FT 5 nm 10" In-line PP 3/8" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GS2FM1EM41FT 5 nm 10" In-line PP 1" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GSCEM1F000T 1 nm 10" In-line N/A Code 0 No E-FKM
GSCEM1F00KT 1 nm 10" In-line N/A Code 0 Yes E-FKM
GSCEM1F0RKT 1 nm 10" In-line N/A Code 0 Yes Kalrez 6375
GSCEM2F00KT 1 nm 20" In-line N/A Code 0 Yes E-FKM
GSCEM2F0RKT 1 nm 20" In-line N/A Code 0 Yes Kalrez 6375
GSCFM1E000T 5 nm 10" In-line N/A Code 0 No E-FKM
GSCFM1E00KT 5 nm 10" In-line N/A Code 0 Yes E-FKM
GSCFM1E0RKT 5 nm 10" In-line N/A Code 0 Yes Kalrez 6375
GSCFM2E00KT 5 nm 20" In-line N/A Code 0 Yes E-FKM
GSCFM2E0RKT 5 nm 20" In-line N/A Code 0 Yes Kalrez 6375
GSDEM1F902ST 1 nm 10" T-line PFA 3/4" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar fitting No N/A
GSDEM1F942ST 1 nm 10" T-line PFA 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar fitting No N/A
GSDEM1FT02HT 1 nm 10" T-line PFA 3/4" inlet/outlet, 1/2" vent/drain, Super Type Pillar Fitting No N/A
GSDFM1E902ST 5 nm 10" T-line PFA 3/4" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar fitting No N/A
GSDFM1E942ST 5 nm 10" T-line PFA 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar fitting No N/A
GSDFM1ET02HT 5 nm 10" T-line PFA 3/4" inlet/outlet, 1/2" vent/drain, Super Type Pillar Fitting No N/A
GSLEM1F102FT 1 nm 10" In-line PFA 3/4" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GSLEM1FM01ST 1 nm 10" In-line PFA 3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar fitting No N/A
GSLFM1E102FT 5 nm 10" In-line PFA 3/4" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GSLFM1EM01ST 5 nm 10" In-line PFA 3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar fitting No N/A
GSLFM1EM41FT 5 nm 10" In-line PFA 1" inlet/outlet, 1/4" vent/drain, Flaretek compatible fitting No N/A
GSLFM1EM41ST 5 nm 10" In-line PFA 1" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar fitting No N/A
