美国ENTEGRIS英特格，SI2N0200B16散装在线金属气体过滤器过滤器
美国ENTEGRIS英特格，SI2N0200B16散装在线金属气体过滤器过滤器
美国ENTEGRIS英特格，SI2N0200B16散装在线金属气体过滤器过滤器
Wafergard
III Bulk In-line Metal Gas Filters
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All-metal high-flow filters satisfy the concerns and needs to supply particle-free process gas at the point of delivery.
Available with nickel filtration membranes for all process gases
Comes in a variety of fitting types to meet our customers’ installation requirements
Available with 0.0015 µm filtration technology to meet the most demanding needs of ultra-clean bulk gas delivery
APPLICATIONS
Wafergard III Bulk In-line Metal Gas Filters Applications
Bulk gas farm and Bulk Special Gas System (BSGS)
Ultra-high purity gas lines
High temperature applications
New fab construction and/or upgrade existing filters
Part number Fitting configuration D1 D2 L1 L2
SI2N0010R VCR male – 38.1 mm (1.5") 213 mm (8.4") 35.9 mm (1.4")
SI2N0010RV VCR male – 38.1 mm (1.5") 213 mm (8.4") 35.9 mm (1.4")
SI2N0025R VCR male – 38.1 mm (1.5") 305 mm (12.0") 35.9 mm (1.4")
SI2N0025RV VCR male – 38.1 mm (1.5") 305 mm (12.0") 35.9 mm (1.4")
SI2N0050R VCR male – 76.2 mm (3.0") 213 mm (8.4") 35.2 mm (1.4")
SI2N0050R4 VCR male – 76.2 mm (3.0") 225 mm (8.9") 30.2 mm (1.2")
SI2N0100B Butt weld 25.4 mm (1.0") 101.6 mm (4.0") 267 mm (10.5") 57.2 mm (2.3")
SI2N0100BRR6 VCR male – 101.6 mm (4.0") 384 mm (15.1") 115.9 mm (4.6")
SI2N0100BRR8 VCR male – 101.6 mm (4.0") 384 mm (15.1") 115.9 mm (4.6")
SI2N0200B Butt weld 38.1 mm (1.5") 101.6 mm (4.0") 356 mm (14.0") 57.2 mm (2.3")
SI2N0200B16 Butt weld 50.8 mm (2.0") 101.6 mm (4.0") 356 mm (14.0") 52.1 mm (2.1")
SI2N0200R VCR male – 101.6 mm (4.0") 354 mm (13.9") 56.4 mm (2.2")
SI2N0400B Butt weld 50.8 mm (2.0") 152.4 mm (6.0") 358 mm (14.1") 51.9 mm (2.1")
SI2N0200A1007 ANSI 150 RF flange – 101.6 mm (4.0") 356 mm (14.0") 44.5 mm (1.8")
SI2N0200A1015 ANSI 150 RF flange – 101.6 mm (4.0") 356 mm (14.0") 39.7 mm (1.6")
SI2N0200A1020 ANSI 150 RF flange – 101.6 mm (4.0") 356 mm (14.0") 38.5 mm (1.5")
SI2N0200J1015 JIS 10K RF flange – 101.6 mm (4.0") 356 mm (14.0") 41.7 mm (1.6")
SI2N0400A1030 ANSI 150 RF flange – 152.4 mm (6.0") 358 mm (14.1") 28.2 mm (1.1")
SI2N0400B24 Butt weld 76.2 mm (3.0") 152.4 mm (6.0") 358 mm (14.1") 52.1 mm (2.05")
Product Specifications
Materials Filter element Sintered nickel membrane filter
Housing Electropolished VAR 316L stainless steel
Removal rating 0.0015 µm
Surface finish interior <10 µin Ra
Downstream cleanliness <0.03 particlester (<1 particle/ft3) >0.01 µm
Helium leak rating 1 x 10-9 atm ccc
Maximum operating conditions Maximum operating pressure: 50 bar (725 psig) SI2N0010R, SI2N0025R
31 bar (450 psig) SI2N0050R, SIN0100B, SI2N0200B, SI2N0200R
17 bar (250 psig) SI2N0400B
Maximum forward/reverse differential pressure: 5.2 bar (75 psid)
Maximum operating temperature in inert gases: 200°C (392°F)
Particle retention Greater than 99.9999999% (9 LRV) removal of all particles at maximum rated flow (referenced at the most penetrating particle size)
PART NUMBERS
Wafergard III Bulk In-line Metal Gas Filters Part Numbers
PART NUMBER FITTING SIZE AND TYPE LENGTH
SI2N0010R 10 CFM, 1/2" VCR male 213 mm (8.40")
SI2N0010RV 10 CFM, 1/2" VCR male. V=specially treated version 213 mm (8.40")
SI2N0025R 25 CFM, 1/2" VCR male 305 mm (12.00")
SI2N0025RV 25 CFM, 1/2" VCR male. V=specially treated version 305 mm (12.00")
SI2N0050R 50 CFM, 3/4" VCR male 213 mm (8.40")
SI2N0050R4 50 CFM, 1/2" VCR male 225 mm (8.9")
SI2N0100B 100 CFM, 1" Butt weld tube 267 mm (10.50")
SI2N0100BRR6 100 CFM, 3/4" VCR male 384 mm (15.1")
SI2N0100BRR8 100 CFM, 1" VCR male 384 mm (15.1")
SI2N0200A1007 200 CFM, 3/4" ANSI 150 RF flange 356 mm (14.0")
SI2N0200A1015 200 CFM, 1 1/2" ANSI 150 RF flange 356 mm (14.0")
SI2N0200A1020 200 CFM, 2" ANSI 150 RF flange 356 mm (14.0")
SI2N0200B 200 CFM, 1 1/2" Butt weld tube 356 mm (14.0")
SI2N0200B16 200 CFM, 2" butt weld tube 356 mm (14.0")
SI2N0200J1015 200 CFM, 40A JIS 10K RF flange 356 mm (14.0")
SI2N0200R 200 CFM, 1" VCR male 354 mm (13.9")
SI2N0400A1030 400 CFM, 3" ANSI 150 RF flange 358 mm (14.1")
SI2N0400B 400 CFM, 2" butt weld tube 358 mm (14.1")
SI2N0400B24 400 CFM, 2" butt weld tube 358 mm (14.1")