美国ENTEGRIS英特格Chambergard™ Fast Vent Diffusers，扩散器，WG3D50DR2
美国ENTEGRIS英特格Chambergard™ Fast Vent Diffusers，扩散器，WG3D50DR2
美国ENTEGRIS英特格Chambergard™ Fast Vent Diffusers，扩散器，WG3D50DR2
Increase efficiency and throughput by reducing particles and vent times in load lock and transfer chambers.
Patented, sintered nickel technology provides superior performance in all applications
Design enables removal of particles from incoming gas greater than 0.0015 µm, minimizing wafer defects
Provides rapid venting without disturbing or adding particles to wafers, decreasing cycle times while increasing throughput
Combines flow characteristics of a diffuser with a high-efficiency filter to increase efficiency and throughput
Easy retrofit/installation into existing tools minimizes downtime
APPLICATIONSChambergard™ Fast Vent Diffusers Applications
SPECIFICATIONS
DrawingsPrevious SlideNext Slide
Performance DataPrevious SlideNext Slide
Product Specifications
| Materials |
Diffuser element: Patented, sintered nickel membrane filter |
| |
Housing: 316L stainless steel |
| |
Surface finish internal: ≤32 μin Ra |
| Performance |
Downstream cleanliness: Cleanliness less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm at rated flow |
| |
Removal rating: ≥0.0015 μm |
| |
Reliability: 100,000 cycle reliability at maximum rated inlet pressure at 25°C (77°F) |
| Connections |
Refer to data sheet |
| Operating conditions |
Refer to data sheet |
PART NUMBERS
Chambergard
Fast Vent Diffusers Part Numbers
PART NUMBER O-RING SIZE O-RING GROOVE OD OUTLET CONNECTION TYPE O-RING GROOVE ID O-RING GROOVE DEPTH OPERATING CONDITIONS, MAXIMUM INLET PRESSURE WITH OUTLET TO VACUUM OPERATING CONDITIONS, MAXIMUM DIFFERENTIAL PRESSURE OPERATING CONDITIONS, MAXIMUM OPERATING TEMPERATURE INLET CONNECTION TYPE
SI2P134R5 None None In-Line None None 0.5 MPa (75 psi) 0.24 MPa (35 psi) 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring 1/4" VCR compatible male gasket seal fitting
WG3D16TR2 2-117 26.4 mm (1.03") ISO NW-16, bulkhead mounting compatible with standard ISO bulkhead clamps 20.3 mm (0.79") 1.9 mm (0.07") 0.7 MPa (100 psi) 0.8 MPa (115 psi) 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring 1/4" VCR compatible male gasket seal fitting
WG3D228R2 2-117 26.4 mm (1.03") ISO NW-16, bulkhead mounting compatible with standard ISO bulkhead clamps 20.3 mm (0.79") 1.9 mm (0.07") 0.7 MPa (100 psi) 0.8 MPa (115 psi) 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring 1/4" VCR compatible male or female gasket seal fitting or butt weld fitting
WG3D25LR2 2-123 35.9 mm (1.41") ISO NW-25, bulkhead mounting compatible with standard ISO bulkhead clamps 29.8 mm (1.17") 1.9 mm (0.07") 0.7 MPa (100 psi) 0.8 MPa (115 psi) 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring 1/4" VCR compatible male gasket seal fitting
WG3D25SR2 2-123 35.9 mm (1.41") ISO NW-25, bulkhead mounting compatible with standard ISO bulkhead clamps 29.8 mm (1.17") 1.9 mm (0.07") 0.7 MPa (100 psi) 0.8 MPa (115 psi) 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring 1/4" VCR compatible male gasket seal fitting
WG3D3LBW2 None None None None None 0.7 MPa (100 psi) 0.8 MPa (115 psi) 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring 20 mm butt weld tube stub
WG3D401R2 2-246 114.3 mm (4.50") ISO NW-100, bolt through 122.4 mm (4.81) 2.6 mm (0.10") 0.25 MPa (35 psi) 0.35 MPa (50 psi) 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring 1/4" VCR compatible male gasket seal fitting
WG3D40DR2 2-224 52.1 mm (2.05") ISO NW-40, bulkhead mounting compatible with standard ISO bulkhead clamps 44 mm (1.73") 2.6 mm (0.10") 0.3 MPa (45 psi) 0.4 MPa (60 psi) 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring 1/4" VCR compatible male gasket seal fitting
WG3D40TR2 2-224 52.1 mm (2.05") ISO NW-40, bulkhead mounting compatible with standard ISO bulkhead clamps 44 mm (1.73") 2.6 mm (0.10") 0.7 MPa (100 psi) 0.8 MPa (115 psi) 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring 1/4" VCR compatible male gasket seal fitting
WG3D50DR2 2-229 67.9 mm (2.67") ISO NW-50, bulkhead mounting compatible with standard ISO bulkhead clamps 59.9 mm (2.35") 2.6 mm (0.10") 0.2 MPa (30 psi) 0.3 MPa (45 psi) 100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring 1/4" VCR compatible male gasket seal fitting***Part Number WG3D401R2 Includes connector kit; P71917 Bolts and Washers