萨瓦那®
在
筒式过滤器
全氟聚合物过滤
积极的化学物质
Savana®AT滤芯采用全氟聚合物设计
施工持续清除颗粒从大范围
酸，碱和其他加工化学品。理想的中，高流量应用，Savana滤筒过滤器提供低
拥有成本(COO)。
优化的过滤面积最大限度地减少了压降
该过滤器不影响增强颗粒去除
设计特点。含氟高分子材料
和设备结构使较低的可提取和其他
可能对加工过程有害的污染物，而
在清洁，耐用的过滤器中提供高保留性能
ENTEGRIS英特格过滤器，Savana® AT Filter，SVTG02TQ1自营现货
Cost effective filtration for non-outgassing chemistries and solvents at moderate temperatures in applications where metal control is not critical.
APPLICATIONS
Savana
AT Filter Applications
Aggressive acid and base, point-of-tool filtration
Bulk chemical delivery and wet etch and clean semiconductor applications
Purification life sciences applications
Bulk chemical flat panel display applications
Substrate - Ni-P plating and magnetic head - wet etch and clean data storage applications
LED applications
Drawings
Performance DataPrevious SlideNext Slide
Product Specifications
| |
|
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| Materials: |
Membrane |
PTFE |
| |
Support |
PFA |
| |
O-ring |
Encapsulated FKM (E-FKM) |
| Retention rating: |
0.05, 0.1, 0.2, 0.5, 1, 5, 10 µm |
|
| Shelf life (prewet option): |
1 year |
|
| Membrane area: |
4" |
0.23 m2 (2.48 ft2) |
| |
10" |
0.8 m2 (8.61 ft2) |
| |
20" |
1.6 m2 (17.22 ft2) |
| |
30" |
2.4 m2 (25.83 ft2) |
| Maximum operating conditions: |
Maximum forward differential pressure |
0.51 MPa (5.1 bar, 74 psi) @ 25°C (77°F) |
| |
Maximum reverse differential pressure |
0.35 MPa (3.5 bar, 50 psi) @ 25°C (77°F) |
| |
Maximum operating temperature |
120°C (248°F) at the above conditions |
| Notes: |
Prewet filters are enclosed in bag filled with DI water and 1% H202. Drain and flush with 20 liters of DI water (per 10”) after installing filter.
Savana® AT can be sterilized by autoclaving up to 50 cycles at 125°C or sterilized by steam-in-place up to 50 cycles at 135°C for 30 minutes at less than 0.3 bar differential pressure.
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PART NUMBERS
Savana AT Filter Part Numbers
PART NUMBER CHEMLOCK KEY PREWET LENGTH RETENTION RATING
SVTA01TQ1 No No 10" 1 µm
SVTA01TQ1K Yes No 10" 1 µm
SVTA01TQ1KPW Yes Yes 10" 1 µm
SVTA02TQ1 No No 20" 1 µm
SVTA02TQ1K Yes No 20" 1 µm
SVTA02TQ1KPW Yes Yes 20" 1 µm
SVTA02TQ1PW No Yes 20" 1 µm
SVTA03TQ1 No No 30" 1 µm
SVTA0MTQ1 No No 4" 1 µm
SVTA0MTQ1PW No Yes 10" 1 µm
SVTB01TQ1 No No 10" 5.0 µm
SVTB01TQ1K Yes No 10" 5.0 µm
SVTB01TQ1KPW Yes Yes 10" 5.0 µm
SVTB01TQ1PW No Yes 10" 5.0 µm
SVTB02TQ1 No No 20" 5.0 µm
SVTB03TQ1 No No 30" 5.0 µm
SVTB0MTQ1 No No 4" 5.0 µm
SVTC01TQ1 No No 10" 10 µm
SVTC01TQ1K Yes No 10" 10 µm
SVTC01TQ1KPW Yes Yes 10" 10 µm
SVTC01TQ1PW No Yes 10" 10 µm
SVTC02TQ1 No No 20" 10 µm
SVTC03TQ1 No No 30" 10 µm
SVTC0MTQ1 No No 4" 10 µm
SVTC0MTQ1PW No Yes 4" 10 µm
SVTG01TB1PW No Yes 10" 0.2 µm
SVTG01TQ1 No No 10" 0.2 µm
SVTG01TQ1K Yes No 10" 0.2 µm
SVTG01TQ1KPW Yes Yes 10" 0.2 µm
SVTG01TQ1PW No Yes 10" 0.2 µm
SVTG02TQ1 No No 20" 0.2 µm
SVTG02TQ1K Yes No 20" 0.2 µm
SVTG02TQ1KPW Yes Yes 20" 0.2 µm
SVTG02TQ1PW No Yes 20" 0.2 µm
SVTG03TQ1 No No 30" 0.2 µm
SVTG03TQ1PW No Yes 30" 0.2 µm
SVTG0MTQ1 No No 4" 0.2 µm
SVTG0MTQ1PW No Yes 4" 0.2 µm
SVTG73T01 No No 30" 0.2 µm
SVTH01TQ1K Yes No 10" 0.5 µm
SVTH01TQ1KPW Yes Yes 10" 0.5 µm
SVTH01TQ1PW No Yes 10" 0.5 µm
SVTH02TQ1K Yes No 20" 0.5 µm
SVTH02TQ1KPW Yes Yes 20" 0.5 µm
SVTH02TQ1PW No Yes 20" 0.5 µm
SVTH0MTQ1 No No 4" 0.5 µm
SVTH0MTQ1PW No Yes 4" 0.5 µm
SVTV01TQ1 No No 10" 0.1 µm
SVTV01TQ1K Yes No 10" 0.1 µm
SVTV01TQ1KPW Yes Yes 10" 0.1 µm
SVTV01TQ1PW No Yes 10" 0.1 µm
SVTV02TQ1 No No 20" 0.1 µm
SVTV02TQ1K Yes No 20" 0.1 µm
SVTV02TQ1KPW Yes Yes 20" 0.1 µm
SVTV02TQ1PW No Yes 20" 0.1 µm
SVTV03TQ1 No No 30" 0.1 µm
SVTV03TQ1PW No Yes 30" 0.1 µm
SVTV0MTQ1 No No 4" 0.1 µm
SVTV0MTQ1PW No Yes 4" 0.1 µm
SVTY01TQ1 No No 10" 30 nm
SVTY01TQ1K Yes No 10" 30 nm
SVTY02TQ1 No No 20" 30 nm
SVTZ01TQ1 No No 10" 0.05 µm
SVTZ01TQ1K Yes No 10" 0.05 µm
SVTZ01TQ1KPW Yes Yes 10" 0.05 µm
SVTZ01TQ1PW No Yes 10" 0.05 µm
SVTZ02TQ1 No No 20" 0.05 µm
SVTZ02TQ1K Yes No 20" 0.05 µm
SVTZ02TQ1KPW Yes Yes 20" 0.05 µm
SVTZ02TQ1PW No Yes 20" 0.05 µm
SVTZ03TQ1 No No 30" 0.05 µm
SVTZ03TQ1PW No Yes 30" 0.05 µm
SVTZ0MTQ1 No No 4" 0.05 µm
SVTZ0MTQ1PW No Yes 4" 0.05 µm
ENTEGRISWGFG01DS0滤芯
ENTEGRISSVEG01P01
ENTEGRISSVTG01TQ1
ENTEGRISSVTG02TQ1
ENTEGRISWGPM0GGT2过滤器
ENTEGRISWGPM0GGT2过滤器
ENTEGRISWGPM0GGT4过滤器
EntegrisWG3NS6RR2过滤器
ENTEGRISWGFGT1PR1过滤器
ENTEGRISWGFGMBRR4过滤器
ENTEGRISWGFGT1PR1过滤器
ENTEGRISWGFGT1PR1过滤器
ENTEGRISWGPMOGGT2过滤器
ENTEGRISLGMXFPRR4
ENTEGRISWGPMOGGT2过滤器
ENTEGRISWGFGMBRR4过滤器
ENTEGRISWGFGMBRR4过滤器
ENTEGRISWG3NS2RR4过滤器
EntegrisWG2FT1SS2过滤器
ENTEGRISWGPMOGGT2过滤器
ENTEGRISWGPM0GGG2过滤器
ENTEGRISWGFGT1PR1过滤器
ENTEGRISWGFGMBRR4过滤器
EntegrisWG2FT1RR2过滤器
ENTEGRISWGFGMBRR4过滤器
entegrisCTFG01TPE滤芯
ENTEGRISWGPMOGGT4过滤器
ENTEGRISWG2F02RR2
ENTEGRISWG2F02RR2
EntegrisWFRGD3 NF-30 3.3 IN LG WG3NS6RR2
ENTEGRISWG3NS8RR2
ENTEGRISWGPM0GGG2过滤器
ENTEGRISWGPMOGGT2过滤器
ENTEGRISWGPMOGGT2
ENTEGRISWG2F02RR2
ENTEGRISWG2F02RR4
ENTEGRISWGMXMPSS3
ENTEGRISWGMXMPRR4
ENTEGRISWG3NSMSL2
ENTEGRISWGFGT1PR1过滤器
ENTEGRISWG3NS8RR2过滤器
ENTEGRISCBUG0S0S1过滤器
ENTEGRISWG3NSMSL2
ENTEGRISWG3NSMSL2过滤器
ENTEGRISWGMXMSRR4过滤器
ENTEGRISWGMXMSRR2（无包装）
ENTEGRISWGMXMSRR2
ENTEGRISWGMXMSRR2