ENTEGRIS英特格金属过滤器，WGSLNFC1M，Gas Filter
ENTEGRIS英特格金属过滤器，WGSLNFC1M，Gas Filter
ENTEGRIS英特格金属过滤器，WGSLNFC1M，Gas Filter
Wafergard
SL 1.125" C-Seal Gas Filter
Combining the industry's best filter with the smallest surface-mount design, these gas filters provide ultimate process protection while dramatically reducing footprint on gas panels.
Designed to meet 1.125" C-seal surface mount interfaces, minimize outgassing, improve corrosion resistance, and provide excellent chemical compatibility
Reduced total flow area provides superior downstream cleanliness
Cleanroom manufactured and packaged
Available with nickel or stainless membrane
APPLICATIONS
Wafergard SL 1.125" C-Seal Gas Filter Applications
Gas panels
Ultra-high purity gas lines
High-temperature applications
Dynamic pressure applications
Stainless steel filters for inert, hydride and CO2 gases, nickel filters for inert and reactive gases
Product Specifications
Materials Filter element: NF - Patented sintered nickel membrane SF - Proprietary sintered stainless steel membrane
Housing base block SEMI F20 316L electropolished stainless steel
Inlet/outlet connections SurfaceLine 1.125" C-seal
Removal rating >0.0015 μm
Surface finish interior <5 μin Ra
Helium leak rating Qualified: 2 x 10-10 ccc Tested: 1 x 10-9 ccc
Downstream cleanliness Particles* <0.03 particlester (<1 particle/ft3) ≥0.01 µm
Volatiles** Volatile outgassing of H2O, O2 and THC is below detectable limits
(by RGA and FID at room temperature)
Particle retention NF- Greater than 99.9999999% removal of all particles (referenced at the most penetrating particle size)
SF- Greater than 99.9999% removal of all particles (referenced at the most penetrating particle size)
Operating conditions Maximum inlet pressure 34.5 bar (500 psig) @ 20°C (68°F)
Maximum forward/ reverse differential pressure 10 bar (150 psid) @ 23°C (73°F) NF-Micro and SF-Micro
8 bar (115 psid) @ 23°C (73°F) NF-Mini and NF-Mini XL
20 bar (300 psid) @ 23°C (73°F)
Maximum operating temperature Inert gases: 400°C (752°F) @ 35 bar (500 psig)
Corrosive and reactive gases: 50°C (122°F) @ 35 bar (500 psig)
*Particle cleanliness qualified following SEMASPEC Test Method for Particle Shedding (#93021511A-STD).
**Volatile cleanliness qualified follwoing SEMASPEC Test Methods for: THC Contribution (#90120396B-STD), Moisture Contribution (#90120397B-STD), Oxygen Contribution (#90120398B-STD).
PART NUMBERS
Wafergard SL 1.125" C-Seal Gas Filter Part Numbers
PART NUMBER PRODUCT TYPE
WGSLNFC1H NF-Mini XL filter
WGSLNFC1L NF-Micro filter
WGSLNFC1M NF-Mini Filter
WGSLSFC1L SF-Micro filter
WGSLSFC1M SF-Mini filter
